Effects of RF power and pressure on performance of HF-PECVD...

Thin Solid Films 2010 Vol. 518; Iss. 24

Effects of RF power and pressure on performance of HF-PECVD silicon thin-film solar cells

Shui-Yang Lien, Chao-Chun Wang, Chau-Te Shen, Yu-Chih Ou, Yun-Shao Cho, Ko-Wei Weng, Ching-Hsun Chao, Chia-Fu Chen, Dong-Sing Wuu
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Volume:
518
Year:
2010
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2010.04.083
File:
PDF, 339 KB
english, 2010
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