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High Throughput, Low Cost Deposition of Alumina Passivation Layers by Spatial Atomic Layer Deposition
Vermeer, Ad, Roozeboom, F., Poodt, P., Gortzen, RogerVolume:
1323
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2011.959
Date:
January, 2011
File:
PDF, 295 KB
english, 2011