High Throughput, Low Cost Deposition of Alumina Passivation...

High Throughput, Low Cost Deposition of Alumina Passivation Layers by Spatial Atomic Layer Deposition

Vermeer, Ad, Roozeboom, F., Poodt, P., Gortzen, Roger
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
1323
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2011.959
Date:
January, 2011
File:
PDF, 295 KB
english, 2011
Conversion to is in progress
Conversion to is failed