High Dose Implantation in 6H-SiC
Heera, V., Skorupa, Wolfgang, Stoemenos, J., Pécz, BélaVolume:
353-356
Year:
2001
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.353-356.579
File:
PDF, 432 KB
2001