![](/img/cover-not-exists.png)
Novel Gate Oxide Process for Realization of High Threshold Voltage in 4H-SiC MOSFET
Furuhashi, Masayuki, Tanioka, Toshikazu, Imaizumi, Masayuki, Miura, Naruhisa, Yamakawa, SatoshiVolume:
778-780
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.778-780.985
Date:
February, 2014
File:
PDF, 306 KB
english, 2014