Trapping properties of sputtered hafnium oxide films: Bulk...

Thin Solid Films 2010 Vol. 518; Iss. 19

Trapping properties of sputtered hafnium oxide films: Bulk traps vs. interface traps

E. Verrelli, G. Galanopoulos, I. Zouboulis, D. Tsoukalas
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Volume:
518
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2010.05.051
File:
PDF, 1.02 MB
english, 2010
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