Microwave irradiation-assisted method for the deposition of adherent oxide films on semiconducting and dielectric substrates
Sanjaya Brahma, S.A. ShivashankarVolume:
518
Year:
2010
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2010.05.078
File:
PDF, 1.32 MB
english, 2010