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Influence of sputtering parameters and nitrogen on the microstructure of chromium nitride thin films deposited on steel substrate by direct-current reactive magnetron sputtering
Hetal N. Shah, R. Jayaganthan, Davinder Kaur, Ramesh ChandraVolume:
518
Year:
2010
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2010.05.095
File:
PDF, 1.63 MB
english, 2010