3D stepped electrodes on a flexible substrate with...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2013 Vol. 31; Iss. 2

3D stepped electrodes on a flexible substrate with permanently bonded poly(dimethylsiloxane) channels for moving microfluid

Guo, Xin, Xie, Kongying, Campbell, Robert J., Lai, Yongjun
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Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4790651
File:
PDF, 2.49 MB
english, 2013
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