Growth of Thick AlN Layers by High Temperature CVD (HTCVD)

Materials Science Forum 2009 Vol. 600-603

Growth of Thick AlN Layers by High Temperature CVD (HTCVD)

Claudel, Arnaud, Blanquet, Elisabeth, Chaussende, Didier, Audier, M., Pique, D., Pons, Michel
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Volume:
600-603
Year:
2009
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.600-603.1269
File:
PDF, 5.29 MB
english, 2009
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