Epitaxial film growth of chromium dioxide by low pressure...

Epitaxial film growth of chromium dioxide by low pressure chemical vapor deposition using chromium carbonyl

Jinwen Wang, Manjit Pathak, Xing Zhong, Patrick LeClair, Tonya M. Klein, Arunava Gupta
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Volume:
518
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2010.07.001
File:
PDF, 935 KB
english, 2010
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