Epitaxial film growth of chromium dioxide by low pressure chemical vapor deposition using chromium carbonyl
Jinwen Wang, Manjit Pathak, Xing Zhong, Patrick LeClair, Tonya M. Klein, Arunava GuptaVolume:
518
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2010.07.001
File:
PDF, 935 KB
english, 2010