![](/img/cover-not-exists.png)
Preparation and characterization of TaAlOx high-κ dielectric for metal–insulator–metal capacitor applications
M.K. Hota, C. Mahata, M.K. Bera, S. Mallik, C.K. Sarkar, S. Varma, C.K. MaitiVolume:
519
Year:
2010
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2010.07.020
File:
PDF, 1.58 MB
english, 2010