High-Quality HfO[sub 2] Formation using Zr Reduced...

Electrochemical and Solid-State Letters 2008 Vol. 11; Iss. 7

High-Quality HfO[sub 2] Formation using Zr Reduced High-Purity TEMAH

Miya, Hironobu, Asai, Masayuki, Hirahara, Kazuhiro, Kinoshita, Yuta, Hirose, Fumihiko
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Volume:
11
Year:
2008
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.2929661
File:
PDF, 135 KB
english, 2008
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