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Fourier transform infrared spectroscopy characterization of AlN thin films grown on sacrificial silicon oxide layers via metal organic vapor phase epitaxy
S. Kuchibhatla, L.E. Rodak, D. KorakakisVolume:
519
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2010.07.076
File:
PDF, 420 KB
english, 2010