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Chemical states of carbon in amorphous boron carbide thin films deposited by radio frequency magnetron sputtering
Ruqiang Bao, Douglas B. ChriseyVolume:
519
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2010.07.090
File:
PDF, 1.15 MB
english, 2010