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Atomic layer deposition of tantalum nitride based thin films from cyclopentadienyl type precursor
A. Correia Anacleto, A. Zauner, D. Cany-Canian, J. Gatineau, M.-C. HugonVolume:
519
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2010.07.115
File:
PDF, 820 KB
english, 2010