Piezoresistive polysilicon film obtained by low-temperature aluminum-induced crystallization
Suraj Kumar Patil, Zeynep Çelik-Butler, Donald P. ButlerVolume:
519
Year:
2010
Language:
english
Pages:
8
DOI:
10.1016/j.tsf.2010.07.121
File:
PDF, 1.24 MB
english, 2010