Low refractive index silicon oxide coatings at room temperature using atmospheric-pressure very high-frequency plasma
H. Kakiuchi, H. Ohmi, Y. Yamaguchi, K. Nakamura, K. YasutakeVolume:
519
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2010.08.003
File:
PDF, 477 KB
english, 2010