Effects of N2-annealing conditions on the sensing properties of Pt/HfO2/SiC Schottky-diode hydrogen sensor
W.M. Tang, C.H. Leung, P.T. LaiVolume:
519
Year:
2010
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2010.08.090
File:
PDF, 1.11 MB
english, 2010