Atomic layer deposition and characterization of zirconium...

Thin Solid Films 2010 Vol. 519; Iss. 2

Atomic layer deposition and characterization of zirconium oxide–erbium oxide nanolaminates

Aile Tamm, Mikko Heikkilä, Marianna Kemell, Jekaterina Kozlova, Kaupo Kukli, Väino Sammelselg, Mikko Ritala, Markku Leskelä
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Volume:
519
Year:
2010
Language:
english
Pages:
8
DOI:
10.1016/j.tsf.2010.08.111
File:
PDF, 1.34 MB
english, 2010
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