Deposition of Al doped ZnO layers with various electrical...

Thin Solid Films 2010 Vol. 519; Iss. 2

Deposition of Al doped ZnO layers with various electrical types by atomic layer deposition

Cheol Hyoun Ahn, Hyoungsub Kim, Hyung Koun Cho
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Volume:
519
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2010.08.151
File:
PDF, 778 KB
english, 2010
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