Composition, Structure and Optical Characteristics of...

Materials Science Forum 2004 Vol. 455-456

Composition, Structure and Optical Characteristics of Polymorphous Silicon Films Deposited by PECVD at 27.12 MHz

Martins, Rodrigo, Águas, Hugo, Ferreira, Isabel, Fortunato, Elvira, Raniero, Leandro, Roca i Cabarrocas, Pere
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Volume:
455-456
Year:
2004
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.455-456.100
File:
PDF, 329 KB
english, 2004
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