Optical and structural properties of silicon oxynitride...

Optical and structural properties of silicon oxynitride deposited by plasma enhanced chemical vapor deposition

J. Dupuis, E. Fourmond, D. Ballutaud, N. Bererd, M. Lemiti
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Volume:
519
Year:
2010
Language:
english
Pages:
9
DOI:
10.1016/j.tsf.2010.09.036
File:
PDF, 1.20 MB
english, 2010
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