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Overcoming cap layer cracking for glancing-angle deposited films
M.R. Kupsta, M.T. Taschuk, M.J. Brett, J.C. SitVolume:
519
Year:
2011
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2010.10.056
File:
PDF, 1.41 MB
english, 2011