Comparison of chromium nitride coatings deposited by DC and...

Thin Solid Films 2011 Vol. 519; Iss. 7

Comparison of chromium nitride coatings deposited by DC and RF magnetron sputtering

Shuyong Tan, Xuhai Zhang, Xiangjun Wu, Feng Fang, Jianqing Jiang
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Volume:
519
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2010.10.067
File:
PDF, 933 KB
english, 2011
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