The role of hydrogen in hot wire chemical vapor deposition of Ge-Sb-Te thin films
D. Reso, M. Silinskas, M. Lisker, A. Gewalt, E.P. BurteVolume:
519
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2010.11.026
File:
PDF, 973 KB
english, 2011