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Determination of the Dill parameters of thick positive resist for use in modeling applications
G. Roeder, S. Liu, G. Aygun, P. Evanschitzky, A. Erdmann, M. Schellenberger, L. PfitznerVolume:
519
Year:
2011
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2010.11.068
File:
PDF, 919 KB
english, 2011