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Formation of Deep pn Junctions by MeV Al- and B-ion Implantations into 4H-SiC and Reverse Characteristics
Miyamoto, Nao, Saitoh, A., Kimoto, Tsunenobu, Matsunami, Hiroyuki, Hishida, Y., Watanabe, MasanoriVolume:
338-342
Year:
2000
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.338-342.1347
File:
PDF, 309 KB
2000