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Ellipsometric characterisation of thin films non-uniform in...

Ellipsometric characterisation of thin films non-uniform in thickness

David Nečas, Daniel Franta, Vilma Buršíková, Ivan Ohlídal
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Volume:
519
Year:
2011
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2010.12.065
File:
PDF, 401 KB
english, 2011
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