Spectroscopic ellipsometry studies on hydrogenated...

Thin Solid Films 2011 Vol. 519; Iss. 9

Spectroscopic ellipsometry studies on hydrogenated amorphous silicon thin films deposited using DC saddle field plasma enhanced chemical vapor deposition system

Jhantu Kumar Saha, Barzin Bahardoust, Keith Leong, Adel B. Gougam, Nazir P. Kherani, Stefan Zukotynski
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Volume:
519
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2010.12.074
File:
PDF, 581 KB
english, 2011
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