Characterisation of ultra-shallow disorder profiles and...

Thin Solid Films 2011 Vol. 519; Iss. 9

Characterisation of ultra-shallow disorder profiles and dielectric functions in ion implanted Si

I. Mohacsi, P. Petrik, M. Fried, T. Lohner, J.A. van den Berg, M.A. Reading, D. Giubertoni, M. Barozzi, A. Parisini
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Volume:
519
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2010.12.076
File:
PDF, 726 KB
english, 2011
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