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The Behavior of SiC Films Fabricated by Hybrid Laser-Magnetron Deposition after Immersion
Badea, Nicoleta, Jelinek, M., Tite, T., Prodana, Mariana, Campean, A., Demetrescu, IoanaVolume:
330-332
Year:
2007
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.330-332.537
File:
PDF, 742 KB
english, 2007