Ultra fast self-corrected polarization modulated...

Thin Solid Films 2011 Vol. 519; Iss. 9

Ultra fast self-corrected polarization modulated ellipsometer

Hsiu-Ming Tsai, Leng-Chun Chen, Yu-Faye Chao
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Volume:
519
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2010.12.087
File:
PDF, 321 KB
english, 2011
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