Effects of thermal annealing on Zr–N doped magnetron...

Thin Solid Films 2011 Vol. 519; Iss. 10

Effects of thermal annealing on Zr–N doped magnetron sputtered copper

Ying Wang, Fei Cao, Mi-lin Zhang, Yun-tao Liu
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Volume:
519
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2010.12.095
File:
PDF, 684 KB
english, 2011
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