Extracting thin film hardness of extremely compliant films...

Thin Solid Films 2011 Vol. 519; Iss. 10

Extracting thin film hardness of extremely compliant films on stiff substrates

Seung Min Han, Eric P. Guyer, William D. Nix
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Volume:
519
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2010.12.167
File:
PDF, 279 KB
english, 2011
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