Characterization of pulsed laser deposited hydrogenated amorphous silicon films by spectroscopic ellipsometry
István Hanyecz, Judit Budai, Edit Szilágyi, Zsolt TóthVolume:
519
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2010.12.173
File:
PDF, 474 KB
english, 2011