Effect of N2/H2 plasma treatment on the moisture adsorption...

Effect of N2/H2 plasma treatment on the moisture adsorption of MOCVD–TiN films

J.K. Huang, Cheng-Liang Huang, Shih-Chieh Chang, Yi-Lung Cheng, Ying-Lang Wang
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
519
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2011.01.059
File:
PDF, 744 KB
english, 2011
Conversion to is in progress
Conversion to is failed