Synthesis of Al–Cr–O–N thin films in corundum and f.c.c....

Thin Solid Films 2011 Vol. 519; Iss. 12

Synthesis of Al–Cr–O–N thin films in corundum and f.c.c. structure by reactive r.f. magnetron sputtering

M. Stueber, D. Diechle, H. Leiste, S. Ulrich
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Volume:
519
Year:
2011
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2011.01.144
File:
PDF, 775 KB
english, 2011
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