![](/img/cover-not-exists.png)
Synthesis of Al–Cr–O–N thin films in corundum and f.c.c. structure by reactive r.f. magnetron sputtering
M. Stueber, D. Diechle, H. Leiste, S. UlrichVolume:
519
Year:
2011
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2011.01.144
File:
PDF, 775 KB
english, 2011