Comparison of silicon nanocrystals embedded silicon oxide...

Thin Solid Films 2011 Vol. 519; Iss. 15

Comparison of silicon nanocrystals embedded silicon oxide films by sputtering and PECVD

Chu-Yun Hsiao, Chuan-Feng Shih, Szu-Hung Chen, Wei-Teh Jiang
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Volume:
519
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2011.01.148
File:
PDF, 1.25 MB
english, 2011
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