Multilayer amorphous hydrogenated carbon (a-C:H) and SiOx...

Thin Solid Films 2011 Vol. 519; Iss. 12

Multilayer amorphous hydrogenated carbon (a-C:H) and SiOx doped a-C:H films for optical applications

Asta Tamulevičienė, Šarūnas Meškinis, Vitoldas Kopustinskas, Sigitas Tamulevičius
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Volume:
519
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2011.01.181
File:
PDF, 415 KB
english, 2011
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