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Effect of deposition temperature on chemical composition and electronic properties of amorphous carbon nitride (a-CNx) thin films grown by plasma assisted pulsed laser deposition
E. Cappelli, D.M. Trucchi, S. Kaciulis, S. Orlando, A. Zanza, A. MezziVolume:
519
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2011.01.194
File:
PDF, 631 KB
english, 2011