Properties of composite a-C:H/metal layers deposited by combined RF PECVD/magnetron sputtering techniques
T. Acsente, E.R. Ionita, D. Colceag, A. Moldovan, C. Luculescu, R. Birjega, G. DinescuVolume:
519
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2011.01.201
File:
PDF, 1.00 MB
english, 2011