Using a slit doser to probe gas dynamics during Al2O3...

Thin Solid Films 2011 Vol. 519; Iss. 11

Using a slit doser to probe gas dynamics during Al2O3 atomic layer deposition and to fabricate laterally graded Al2O3 layers

Dragos Seghete, Francois H. Fabreguette, Steven M. George
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Volume:
519
Year:
2011
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2011.01.285
File:
PDF, 1.01 MB
english, 2011
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