Piezoresistive silicon thin film sensor array for...

Thin Solid Films 2011 Vol. 519; Iss. 14

Piezoresistive silicon thin film sensor array for biomedical applications

P. Alpuim, V. Correia, E.S. Marins, J.G. Rocha, I.G. Trindade, S. Lanceros-Mendez
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Volume:
519
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2011.01.300
File:
PDF, 585 KB
english, 2011
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