Low resistivity metal lines formed by functional liquids...

Low resistivity metal lines formed by functional liquids and successive treatment of catalytically generated hydrogen atoms in the Cat-CVD system

Nguyen Thi Thanh Kieu, Keisuke Ohdaira, Tatsuya Shimoda, Hideki Matsumura
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Volume:
519
Year:
2011
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2011.01.303
File:
PDF, 547 KB
english, 2011
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