Preparation of SnO2 thin films at low temperatures with H2...

Thin Solid Films 2011 Vol. 519; Iss. 14

Preparation of SnO2 thin films at low temperatures with H2 gas by the hot-wire CVD method

H. Natsuhara, T. Tatsuyama, M. Ushiro, M. Furuhashi, T. Fujii, F. Ohashi, N. Yoshida, S. Nonomura
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Volume:
519
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2011.01.309
File:
PDF, 646 KB
english, 2011
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