Flash-lamp-crystallized polycrystalline silicon films with high hydrogen concentration formed from Cat-CVD a-Si films
Keisuke Ohdaira, Naohito Tomura, Shohei Ishii, Hideki MatsumuraVolume:
519
Year:
2011
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2011.01.313
File:
PDF, 377 KB
english, 2011