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Nanosecond UV laser graphitization and delamination of thin tetrahedral amorphous carbon films with different sp3/sp2 content
T. Roch, A. Lasagni, E. BeyerVolume:
519
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2011.01.338
File:
PDF, 788 KB
english, 2011