Carbide formation in tungsten-containing amorphous carbon...

Thin Solid Films 2011 Vol. 519; Iss. 12

Carbide formation in tungsten-containing amorphous carbon films by annealing

M. Balden, P.A. Sauter, S. Jong, C. Adelhelm, S. Lindig, M. Rasinski, T. Plocinski
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Volume:
519
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2011.01.403
File:
PDF, 1.08 MB
english, 2011
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