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High-rate deposition by microwave RPECVD at atmospheric pressure
R.P. Cardoso, T. Belmonte, F. Kosior, G. Henrion, E. TixhonVolume:
519
Year:
2011
Language:
english
Pages:
9
DOI:
10.1016/j.tsf.2011.02.003
File:
PDF, 1.56 MB
english, 2011