![](/img/cover-not-exists.png)
ECS Transactions [ECS 217th ECS Meeting - Vancouver, Canada (April 25 - April 30, 2010)] - Suppression Mechanism of Volume Shrinkage for SOG Film by Plasma Treatment
Nagata, Kohki, Kosemura, Daisuke, Takei, Munehisa, Akamatsu, Hiroaki, Hattori, Maki, Koganezawa, Tomoyuki, Machida, Masatake, Son, Jin-Young, Hirosawa, Ichirou, Nishita, Tatsuo, Shiozawa, Toshihiko, KYear:
2010
Language:
english
DOI:
10.1149/1.3372589
File:
PDF, 483 KB
english, 2010